Includes bibliographical references and index.
|Statement||David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.|
|Series||Proceedings of SPIE ;, v. 3048, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3048.|
|Contributions||Seeger, David E., Society of Photo-optical Instrumentation Engineers.|
|LC Classifications||TK7874 .E524 1997|
|The Physical Object|
|Pagination||ix, 412 p. :|
|Number of Pages||412|
|LC Control Number||98122105|
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